Advanced MEMS/NEMS Fabrication and Sensors
(Bog, Paperback / softback, Engelsk)
Forlag:
Springer Nature Switzerland AG
- Type: Bog
- Format: Paperback / softback
-
Sprog:
Engelsk
- ISBN-13: 9783030797515
- Se flere detaljer ▼
Beskrivelse
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications.
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Alle detaljer
| Forlag | Springer Nature Switzerland AG |
| Type | Bog |
| Format | Paperback / softback |
| Sprog | Engelsk |
| Udgave | 2022 ed. |
| Udgivelsesdato | 13-10-2022 |
| Første udgivelsesår | 2022 |
| Illustrationer | 157 Illustrations, color; 10 Illustrations, black and white |
| Fagredaktør | Zhuoqing Yang |
| Originalsprog | Switzerland |
| Sideantal | 312 |
| Indbinding | Paperback / softback |
| Forlag | Springer Nature Switzerland AG |
| Sideoplysninger | 312 pages, 157 Illustrations, color; 10 Illustrations, black and white |
| Mål | 235 x 155 |
| ISBN-13 / EAN-13 | 9783030797515 |