Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications
(Bog, Hardback, Engelsk)
Forlag:
John Wiley & Sons Inc
- Type: Bog
- Format: Hardback
-
Sprog:
Engelsk
- ISBN-13: 9780470625958
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Beskrivelse
This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.
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| Forlag | John Wiley & Sons Inc |
| Forfatter | KA Reinhardt |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgivelsesdato | 04-02-2011 |
| Første udgivelsesår | 2011 |
| Serie | Wiley-Scrivener |
| Fagredaktør | Karen A. Reinhardt, Richard F. Reidy |
| Originalsprog | United States |
| Sideantal | 614 |
| Indbinding | Hardback |
| Forlag | John Wiley & Sons Inc |
| Sideoplysninger | 614 pages |
| Mål | 185 x 263 x 43 |
| ISBN-13 / EAN-13 | 9780470625958 |