Advanced MEMS/NEMS Fabrication and Sensors (Bog, Hardback, Engelsk)

Advanced MEMS/NEMS Fabrication and Sensors

(Bog, Hardback, Engelsk)

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Beskrivelse

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications.

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Alle detaljer

Forlag Springer Nature Switzerland AG
Type Bog
Format Hardback
Sprog Engelsk
Udgave 2022 ed.
Udgivelsesdato 13-10-2021
Første udgivelsesår 2021
Illustrationer 157 Illustrations, color; 10 Illustrations, black and white
Fagredaktør Zhuoqing Yang
Originalsprog Switzerland
Sideantal 312
Indbinding Hardback
Forlag Springer Nature Switzerland AG
Sideoplysninger 312 pages, 157 Illustrations, color; 10 Illustrations, black and white
Mål 235 x 155
ISBN-13 / EAN-13 9783030797485