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Forventes på lager: 24-06-2019
Recent progress in performance enhancement methods for capacitive silicon resonator will be outlined in this work. Several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, will be discussed.
| Forlag | Taylor & Francis Ltd |
| Forfattere | Nguyen Van Toan, Takahito Ono |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgivelsesdato | 24-06-2019 |
| Første udgivelsesår | 2019 |
| Illustrationer | 19 Tables, black and white; 119 Illustrations, black and white |
| Originalsprog | United Kingdom |
| Sideantal | 162 |
| Indbinding | Hardback |
| Forlag | Taylor & Francis Ltd |
| Sideoplysninger | 162 pages, 19 Tables, black and white; 119 Illustrations, black and white |
| Mål | 162 x 240 x 16 |
| ISBN-13 / EAN-13 | 9780367217761 |