Capacitive Silicon Resonators: Performance Enhancement Methods (Bog, Hardback, Engelsk)

Capacitive Silicon Resonators: Performance Enhancement Methods

(Bog, Hardback, Engelsk)
Forfattere: Nguyen Van Toan, Takahito Ono

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Beskrivelse

Recent progress in performance enhancement methods for capacitive silicon resonator will be outlined in this work. Several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, will be discussed.

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Alle detaljer

Forlag Taylor & Francis Ltd
Forfattere Nguyen Van Toan, Takahito Ono
Type Bog
Format Hardback
Sprog Engelsk
Udgivelsesdato 24-06-2019
Første udgivelsesår 2019
Illustrationer 19 Tables, black and white; 119 Illustrations, black and white
Originalsprog United Kingdom
Sideantal 162
Indbinding Hardback
Forlag Taylor & Francis Ltd
Sideoplysninger 162 pages, 19 Tables, black and white; 119 Illustrations, black and white
Mål 162 x 240 x 16
ISBN-13 / EAN-13 9780367217761