Design and Manufacturing of Active Microsystems
(Bog, Hardback, Engelsk)
Beskrivelse
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.
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Alle detaljer
| Forlag | Springer-Verlag Berlin and Heidelberg GmbH & Co. KG |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgave | 2011 |
| Udgivelsesdato | 10-03-2011 |
| Første udgivelsesår | 2011 |
| Serie | Microtechnology and MEMS |
| Illustrationer | XII, 444 p. |
| Fagredaktør | Stephanus Buttgenbach, Arne Burisch, Jurgen Hesselbach |
| Originalsprog | Germany |
| Sideantal | 444 |
| Indbinding | Hardback |
| Forlag | Springer-Verlag Berlin and Heidelberg GmbH & Co. KG |
| Sideoplysninger | 444 pages, XII, 444 p. |
| Mål | 235 x 155 |
| ISBN-13 / EAN-13 | 9783642129025 |