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Forventes på lager: 23-08-2016
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
| Forlag | Springer International Publishing AG |
| Forfattere | Bei Yu, David Z. Pan |
| Type | Bog |
| Format | Paperback / softback |
| Sprog | Engelsk |
| Udgave | Softcover reprint of the original 1st ed. 2016 |
| Udgivelsesdato | 23-08-2016 |
| Første udgivelsesår | 2016 |
| Illustrationer | XI, 164 p. |
| Originalsprog | Switzerland |
| Sideantal | 164 |
| Indbinding | Paperback / softback |
| Forlag | Springer International Publishing AG |
| Sideoplysninger | 164 pages, XI, 164 p. |
| Mål | 235 x 155 |
| ISBN-13 / EAN-13 | 9783319373935 |