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Digital Holography for MEMS and Microsystem Metrology

(Bog, Hardback, Engelsk)
Forfatter: Anand (Nanyang Technological University Asundi
Digital Holography for MEMS and Microsystem Metrology
Forlag: John Wiley & Sons Inc

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Beskrivelse

By taking a practical approach to the industrial inspection of digital holography, Digital Holography for MEMS and Microsystem Metrology offers a description of the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection.

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Alle detaljer

Forlag John Wiley & Sons Inc
Forfatter Anand (Nanyang Technological University Asundi
Type Bog
Format Hardback
Sprog Engelsk
Udgivelsesdato 28-07-2011
Første udgivelsesår 2011
Serie The Wiley Microsystem and Nanotechnology Series
Originalsprog United States
Sideantal 228
Indbinding Hardback
Forlag John Wiley & Sons Inc
Sideoplysninger 228 pages
Mål 237 x 164 x 19
ISBN-13 / EAN-13 9780470978696