Environmental, Safety, and Health Issues in IC Production: Volume 447 (Bog, Hardback, Engelsk)
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Environmental, Safety, and Health Issues in IC Production: Volume 447

(Bog, Hardback, Engelsk)
Environmental, Safety, and Health Issues in IC Production: Volume 447
Forlag: Materials Research Society

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Beskrivelse

This book provides an overview of the available scientific information on environmentally benign IC production. A broad range of topics is addressed including work on resource reduction for chemicals, gases and DI water, reuse or recycling of chemicals, waste treatment strategies, environmentally friendly alternative technologies and analytical technologies for environmental studies.

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Alle detaljer

Forlag Materials Research Society
Type Bog
Format Hardback
Sprog Engelsk
Udgivelsesdato 05-06-1997
Første udgivelsesår 1997
Serie MRS Proceedings
Illustrationer Worked examples or Exercises
Fagredaktør Allen Bowling, Marc Heyns, Rafael (Massachusetts Institute of Technology) Reif, Alessandro Tonti
Originalsprog United States
Sideantal 168
Indbinding Hardback
Forlag Materials Research Society
Sideoplysninger 168 pages, Worked examples or Exercises
Mål 237 x 160 x 15
ISBN-13 / EAN-13 9781558993518