Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
(Bog, Paperback / softback, Engelsk)
- Type: Bog
- Format: Paperback / softback
-
Sprog:
Engelsk
- ISBN-13: 9783319882840
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Beskrivelse
This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.
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| Forlag | Springer International Publishing AG |
| Forfatter | Maria Angela Pampillon Arce |
| Type | Bog |
| Format | Paperback / softback |
| Sprog | Engelsk |
| Udgave | Softcover reprint of the original 1st ed. 2017 |
| Udgivelsesdato | 18-05-2018 |
| Første udgivelsesår | 2018 |
| Serie | Springer Theses |
| Illustrationer | 6 Illustrations, color; 110 Illustrations, black and white; XXIII, 164 p. 116 illus., 6 illus. in color. |
| Originalsprog | Switzerland |
| Sideantal | 164 |
| Indbinding | Paperback / softback |
| Forlag | Springer International Publishing AG |
| Sideoplysninger | 164 pages, 6 Illustrations, color; 110 Illustrations, black and white; XXIII, 164 p. 116 illus., 6 i |
| Mål | 235 x 155 |
| ISBN-13 / EAN-13 | 9783319882840 |