Handbook of Semiconductor Interconnection Technology (Bog, Hardback, Engelsk) af Geraldine Cogin Shwartz
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Handbook of Semiconductor Interconnection Technology

(Bog, Hardback, Engelsk)
Forfatter: Geraldine Cogin Shwartz
Handbook of Semiconductor Interconnection Technology
Forlag: Taylor & Francis Inc

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Beskrivelse

Describes the equipment used in manufacturing for deposition and etching, such as electrochemical deposition equipment used for plating copper. This book emphasizes the measurement of mechanical and thermal properties as well as the use of EELS, energy filtering TEM, and atomic force microscopy.

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Alle detaljer

Forlag Taylor & Francis Inc
Forfatter Geraldine Cogin Shwartz
Type Bog
Format Hardback
Sprog Engelsk
Udgave 2 ed
Udgivelsesdato 22-02-2006
Første udgivelsesår 2006
Illustrationer 12 Tables, black and white; 1 Halftones, black and white; 227 Illustrations, black and white
Fagredaktør Geraldine C. (Poughkeepsie Schwartz, Kris V. (Wappingers Falls Srikrishnan
Originalsprog United States
Sideantal 536
Indbinding Hardback
Forlag Taylor & Francis Inc
Sideoplysninger 536 pages, 12 Tables, black and white; 1 Halftones, black and white; 227 Illustrations, black and wh
Mål 241 x 171
ISBN-13 / EAN-13 9781574446746