Handbook of Silicon Semiconductor Metrology
(Bog, Hardback, Engelsk)
Forlag:
Taylor & Francis Inc
- Type: Bog
- Format: Hardback
-
Sprog:
Engelsk
- ISBN-13: 9780824705060
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Beskrivelse
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, overlay, and dopant dose.
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| Forlag | Taylor & Francis Inc |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgivelsesdato | 29-06-2001 |
| Første udgivelsesår | 2001 |
| Fagredaktør | Alain C. Diebold |
| Originalsprog | United States |
| Sideantal | 894 |
| Indbinding | Hardback |
| Forlag | Taylor & Francis Inc |
| Sideoplysninger | 894 pages |
| Mål | 257 x 185 x 49 |
| ISBN-13 / EAN-13 | 9780824705060 |