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  6. Mechanical Properties of Silicon Based Compounds: Silicides

Mechanical Properties of Silicon Based Compounds: Silicides

(Bog, Paperback / softback, Engelsk)
Forfatter: Joshua Pelleg
Mechanical Properties of Silicon Based Compounds: Silicides
Forlag: Springer Nature Switzerland AG

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This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. A special chapter is given on deformation in silicides in the nano scale.

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Alle detaljer

Forlag Springer Nature Switzerland AG
Forfatter Joshua Pelleg
Type Bog
Format Paperback / softback
Sprog Engelsk
Udgave 2019 ed.
Udgivelsesdato 14-08-2020
Første udgivelsesår 2020
Serie Engineering Materials
Illustrationer 12 Illustrations, color; 303 Illustrations, black and white
Originalsprog Switzerland
Sideantal 274
Indbinding Paperback / softback
Forlag Springer Nature Switzerland AG
Sideoplysninger 274 pages, 12 Illustrations, color; 303 Illustrations, black and white
Mål 235 x 155
ISBN-13 / EAN-13 9783030226008