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Forventes på lager: 20-01-2015
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
| Forlag | Springer-Verlag Berlin and Heidelberg GmbH & Co. KG |
| Forfattere | Hans H. Gatzen, Volker Saile, Jurg Leuthold |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgave | 2015 ed. |
| Udgivelsesdato | 20-01-2015 |
| Første udgivelsesår | 2015 |
| Illustrationer | 54 Illustrations, color; 303 Illustrations, black and white; XXVI, 519 p. 357 illus., 54 illus. in color. |
| Originalsprog | Germany |
| Sideantal | 519 |
| Indbinding | Hardback |
| Forlag | Springer-Verlag Berlin and Heidelberg GmbH & Co. KG |
| Sideoplysninger | 519 pages, 54 Illustrations, color; 303 Illustrations, black and white; XXVI, 519 p. 357 illus., 54 |
| Mål | 240 x 164 x 31 |
| ISBN-13 / EAN-13 | 9783662443941 |