Micro and Nano Fabrication: Tools and Processes (Bog, Hardback, Engelsk) af Hans H. Gatzen

Micro and Nano Fabrication: Tools and Processes

(Bog, Hardback, Engelsk)
Forfattere: Hans H. Gatzen, Volker Saile, Jurg Leuthold



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Beskrivelse

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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Alle detaljer

Forlag Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Forfattere Hans H. Gatzen, Volker Saile, Jurg Leuthold
Type Bog
Format Hardback
Sprog Engelsk
Udgave 2015 ed.
Udgivelsesdato 20-01-2015
Første udgivelsesår 2015
Illustrationer 54 Illustrations, color; 303 Illustrations, black and white; XXVI, 519 p. 357 illus., 54 illus. in color.
Originalsprog Germany
Sideantal 519
Indbinding Hardback
Forlag Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Sideoplysninger 519 pages, 54 Illustrations, color; 303 Illustrations, black and white; XXVI, 519 p. 357 illus., 54
Mål 240 x 164 x 31
ISBN-13 / EAN-13 9783662443941