Micro/Nanolithography: A Heuristic Aspect on the Enduring Technology

(Bog, Hardback, Engelsk)



Forlag: IntechOpen

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Beskrivelse

The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques.

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Alle detaljer

Forlag IntechOpen
Type Bog
Format Hardback
Sprog Engelsk
Udgivelsesdato 02-05-2018
Første udgivelsesår 2018
Fagredaktør Jagannathan Thirumalai
Originalsprog United Kingdom
Sideantal 134
Indbinding Hardback
Forlag IntechOpen
Sideoplysninger 134 pages
Mål 176 x 251 x 17
ISBN-13 / EAN-13 9781789230307