Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Bog, Hardback, Engelsk) af Saburo Nonogaki

Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

(Bog, Hardback, Engelsk)
Forfattere: Saburo Nonogaki, Ueno Takumi, Toshio Ito

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Beskrivelse

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

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Alle detaljer

Forlag Taylor & Francis Inc
Forfattere Saburo Nonogaki, Ueno Takumi, Toshio Ito
Type Bog
Format Hardback
Sprog Engelsk
Udgivelsesdato 25-06-1998
Første udgivelsesår 1998
Originalsprog United States
Sideantal 336
Indbinding Hardback
Forlag Taylor & Francis Inc
Sideoplysninger 336 pages
Mål 229 x 152
ISBN-13 / EAN-13 9780824799519