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Forventes på lager: 20-05-2020
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
| Forlag | Taylor & Francis Inc |
| Forfattere | Bruce W. Smith, Kazuaki (Nikon Corporation Suzuki |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgave | 3 ed |
| Udgivelsesdato | 20-05-2020 |
| Første udgivelsesår | 2020 |
| Illustrationer | 30 Tables, black and white; 570 Illustrations, black and white |
| Fagredaktør | Bruce W. (Rochester Institute of Technology Smith, Kazuaki (Nikon Corporation Suzuki |
| Originalsprog | United States |
| Sideantal | 838 |
| Indbinding | Hardback |
| Forlag | Taylor & Francis Inc |
| Sideoplysninger | 838 pages, 30 Tables, black and white; 570 Illustrations, black and white |
| Mål | 254 x 178 |
| ISBN-13 / EAN-13 | 9781439876756 |