Microlithography: Science and Technology (Bog, Hardback, Engelsk) af Bruce W. Smith

Microlithography: Science and Technology

(Bog, Hardback, Engelsk)
Forfattere: Bruce W. Smith, Kazuaki (Nikon Corporation Suzuki

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Beskrivelse

Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.

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Alle detaljer

Forlag Taylor & Francis Inc
Forfattere Bruce W. Smith, Kazuaki (Nikon Corporation Suzuki
Type Bog
Format Hardback
Sprog Engelsk
Udgave 3 ed
Udgivelsesdato 20-05-2020
Første udgivelsesår 2020
Illustrationer 30 Tables, black and white; 570 Illustrations, black and white
Fagredaktør Bruce W. (Rochester Institute of Technology Smith, Kazuaki (Nikon Corporation Suzuki
Originalsprog United States
Sideantal 838
Indbinding Hardback
Forlag Taylor & Francis Inc
Sideoplysninger 838 pages, 30 Tables, black and white; 570 Illustrations, black and white
Mål 254 x 178
ISBN-13 / EAN-13 9781439876756