Optical Inspection of Microsystems, Second Edition (Bog, Hardback, Engelsk)
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Optical Inspection of Microsystems, Second Edition

(Bog, Hardback, Engelsk)
Optical Inspection of Microsystems, Second Edition
Forlag: Taylor & Francis Inc

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This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS.

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Alle detaljer

Forlag Taylor & Francis Inc
Type Bog
Format Hardback
Sprog Engelsk
Udgave 2 ed
Udgivelsesdato 25-06-2019
Første udgivelsesår 2019
Illustrationer 20 Tables, black and white; 25 Illustrations, color; 477 Illustrations, black and white
Fagredaktør Wolfgang (Universitat Stuttgart Osten
Originalsprog United States
Sideantal 570
Indbinding Hardback
Forlag Taylor & Francis Inc
Sideoplysninger 570 pages, 20 Tables, black and white; 25 Illustrations, color; 477 Illustrations, black and white
Mål 188 x 262 x 30
ISBN-13 / EAN-13 9781498779470