Principles of Lithography
(Bog, Hardback, Engelsk)
Forlag:
SPIE Press
- Type: Bog
- Format: Hardback
-
Sprog:
Engelsk
- ISBN-13: 9781510627604
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Beskrivelse
This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, have become more significant to practicing lithographers. As such extensive treatments of these topics are provided.
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| Forlag | SPIE Press |
| Forfatter | Harry J. Levinson |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgave | Fourth Edition |
| Udgivelsesdato | 30-07-2019 |
| Første udgivelsesår | 2019 |
| Serie | Press Monographs |
| Originalsprog | United States |
| Sideantal | 630 |
| Indbinding | Hardback |
| Forlag | SPIE Press |
| Sideoplysninger | 630 pages |
| Mål | 185 x 262 x 31 |
| ISBN-13 / EAN-13 | 9781510627604 |