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Forventes på lager: 10-04-2020
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps.
| Forlag | Springer Nature Switzerland AG |
| Forfatter | Michael Huff |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgave | 2020 ed. |
| Udgivelsesdato | 10-04-2020 |
| Første udgivelsesår | 2020 |
| Serie | Microsystems and Nanosystems |
| Illustrationer | 24 Illustrations, color; 212 Illustrations, black and white; XIX, 521 p. 236 illus., 24 illus. in color. |
| Originalsprog | Switzerland |
| Sideantal | 521 |
| Indbinding | Hardback |
| Forlag | Springer Nature Switzerland AG |
| Sideoplysninger | 521 pages, 24 Illustrations, color; 212 Illustrations, black and white; XIX, 521 p. 236 illus., 24 i |
| Mål | 235 x 155 |
| ISBN-13 / EAN-13 | 9783030405588 |