Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing
(Bog, Hardback, Engelsk)
Forlag:
Taylor & Francis Inc
- Type: Bog
- Format: Hardback
-
Sprog:
Engelsk
- ISBN-13: 9780849335433
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Beskrivelse
Introduces radical-reaction-based semiconductor manufacturing technologies that overcome the limitations of the molecule-reaction-based technologies. This book details the procedures and underlying concepts involved along with other wet process technologies and applications.
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| Forlag | Taylor & Francis Inc |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgivelsesdato | 21-12-2005 |
| Første udgivelsesår | 2005 |
| Illustrationer | 42 Tables, black and white; 47 Halftones, black and white; 465 Illustrations, black and white |
| Fagredaktør | Tadahiro (Tohoku University Ohmi |
| Originalsprog | United States |
| Sideantal | 400 |
| Indbinding | Hardback |
| Forlag | Taylor & Francis Inc |
| Sideoplysninger | 400 pages, 42 Tables, black and white; 47 Halftones, black and white; 465 Illustrations, black and w |
| Mål | 262 x 186 x 28 |
| ISBN-13 / EAN-13 | 9780849335433 |