Semiconductor Industry: Wafer Fab Exhaust Management
(Bog, Hardback, Engelsk)
Forlag:
Taylor & Francis Inc
- Type: Bog
- Format: Hardback
-
Sprog:
Engelsk
- ISBN-13: 9781574447200
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Beskrivelse
Given the myriad exhaust compounds and the corresponding problems they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, this book offers guidance on selecting an appropriate system for a given application.
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| Forlag | Taylor & Francis Inc |
| Forfatter | J. Michael (Sherer Consulting Services Sherer |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgivelsesdato | 23-06-2005 |
| Første udgivelsesår | 2005 |
| Originalsprog | United States |
| Sideantal | 212 |
| Indbinding | Hardback |
| Forlag | Taylor & Francis Inc |
| Sideoplysninger | 212 pages |
| Mål | 164 x 243 x 17 |
| ISBN-13 / EAN-13 | 9781574447200 |