Silicon Micromachining
(Bog, Paperback / softback, Engelsk)
Forlag:
Cambridge University Press
- Type: Bog
- Format: Paperback / softback
-
Sprog:
Engelsk
- ISBN-13: 9780521607674
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Beskrivelse
This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. It is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).
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Alle detaljer
| Forlag | Cambridge University Press |
| Forfattere | M. (University of Twente Elwenspoek, H. V. (University of Twente Jansen |
| Type | Bog |
| Format | Paperback / softback |
| Sprog | Engelsk |
| Udgivelsesdato | 19-08-2004 |
| Første udgivelsesår | 2004 |
| Serie | Cambridge Studies in Semiconductor Physics and Microelectronic Engineering |
| Illustrationer | 20 Tables, unspecified; 175 Halftones, unspecified; 213 Line drawings, unspecified |
| Originalsprog | United Kingdom |
| Sideantal | 420 |
| Indbinding | Paperback / softback |
| Forlag | Cambridge University Press |
| Serieredaktør | Haroon Ahmad, Michael Pepper, Alec Broers |
| Sideoplysninger | 420 pages, 20 Tables, unspecified; 175 Halftones, unspecified; 213 Line drawings, unspecified |
| Mål | 247 x 189 x 22 |
| ISBN-13 / EAN-13 | 9780521607674 |