Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers

(Bog, Hardback, Engelsk)
Forfattere: Imin Kao, Chunhui Chung

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Beskrivelse

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques.

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Alle detaljer

Forlag John Wiley & Sons Inc
Forfattere Imin Kao, Chunhui Chung
Type Bog
Format Hardback
Sprog Engelsk
Udgivelsesdato 29-01-2021
Første udgivelsesår 2021
Originalsprog United States
Sideantal 304
Indbinding Hardback
Forlag John Wiley & Sons Inc
Sideoplysninger 304 pages
Mål 251 x 175 x 26
ISBN-13 / EAN-13 9780470061213