Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the se... (Bog, Hardback, Engelsk) af J. Doneker
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Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997

(Bog, Hardback, Engelsk)
Forfatter: J. Doneker
Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997
Forlag: Taylor & Francis Ltd

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Beskrivelse

Presents an overview of techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This book addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. It investigates defects in layers and devices.

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Alle detaljer

Forlag Taylor & Francis Ltd
Forfatter J. Doneker
Type Bog
Format Hardback
Sprog Engelsk
Udgivelsesdato 01-01-1998
Første udgivelsesår 1998
Serie Institute of Physics Conference Series
Fagredaktør J. Donecker, I. Rechenberg
Originalsprog United Kingdom
Sideantal 524
Indbinding Hardback
Forlag Taylor & Francis Ltd
Sideoplysninger 524 pages
Mål 234 x 156
ISBN-13 / EAN-13 9780750305006