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Forventes på lager: 16-11-2007
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
| Forlag | John Wiley & Sons Inc |
| Forfatter | Chris (Lithoguru.com) Mack |
| Type | Bog |
| Format | Paperback / softback |
| Sprog | Engelsk |
| Udgivelsesdato | 16-11-2007 |
| Første udgivelsesår | 2007 |
| Originalsprog | United States |
| Sideantal | 544 |
| Indbinding | Paperback / softback |
| Forlag | John Wiley & Sons Inc |
| Sideoplysninger | 544 pages |
| Mål | 174 x 247 x 29 |
| ISBN-13 / EAN-13 | 9780470727300 |