Fundamental Principles of Optical Lithography: The Science of Microfabrication (Bog, Paperback / softback, Engelsk)

Fundamental Principles of Optical Lithography: The Science of Microfabrication

(Bog, Paperback / softback, Engelsk)

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Beskrivelse

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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Forlag John Wiley & Sons Inc
Forfatter Chris (Lithoguru.com) Mack
Type Bog
Format Paperback / softback
Sprog Engelsk
Udgivelsesdato 16-11-2007
Første udgivelsesår 2007
Originalsprog United States
Sideantal 544
Indbinding Paperback / softback
Forlag John Wiley & Sons Inc
Sideoplysninger 544 pages
Mål 174 x 247 x 29
ISBN-13 / EAN-13 9780470727300