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Forventes på lager: 29-11-2020
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.
| Forlag | Springer Verlag, Singapore |
| Forfatter | Jingsong Wei |
| Type | Bog |
| Format | Paperback / softback |
| Sprog | Engelsk |
| Udgave | 2019 ed. |
| Udgivelsesdato | 29-11-2020 |
| Første udgivelsesår | 2020 |
| Serie | Springer Series in Materials Science |
| Illustrationer | 160 Illustrations, color; 22 Illustrations, black and white; XIII, 208 p. 182 illus., 160 illus. in color. |
| Originalsprog | Singapore |
| Sideantal | 208 |
| Indbinding | Paperback / softback |
| Forlag | Springer Verlag, Singapore |
| Sideoplysninger | 208 pages, 160 Illustrations, color; 22 Illustrations, black and white; XIII, 208 p. 182 illus., 160 |
| Mål | 235 x 155 |
| ISBN-13 / EAN-13 | 9789811509452 |