Laser Heat-Mode Lithography: Principle and Methods (Bog, Paperback / softback, Engelsk) af Jingsong Wei

Laser Heat-Mode Lithography: Principle and Methods

(Bog, Paperback / softback, Engelsk)
Forfatter: Jingsong Wei

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Beskrivelse

This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.

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Alle detaljer

Forlag Springer Verlag, Singapore
Forfatter Jingsong Wei
Type Bog
Format Paperback / softback
Sprog Engelsk
Udgave 2019 ed.
Udgivelsesdato 29-11-2020
Første udgivelsesår 2020
Serie Springer Series in Materials Science
Illustrationer 160 Illustrations, color; 22 Illustrations, black and white; XIII, 208 p. 182 illus., 160 illus. in color.
Originalsprog Singapore
Sideantal 208
Indbinding Paperback / softback
Forlag Springer Verlag, Singapore
Sideoplysninger 208 pages, 160 Illustrations, color; 22 Illustrations, black and white; XIII, 208 p. 182 illus., 160
Mål 235 x 155
ISBN-13 / EAN-13 9789811509452