Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine Products
(Bog, Hardback, Engelsk)
Forlag:
Oxford University Press
- Type: Bog
- Format: Hardback
-
Sprog:
Engelsk
- ISBN-13: 9780198562832
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Beskrivelse
The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the technology and systems needed to achieve this level of accuracy. It is written by the leading researchers in Japan, that is: the world leaders.
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| Forlag | Oxford University Press |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgivelsesdato | 25-07-1996 |
| Første udgivelsesår | 1996 |
| Illustrationer | halftones, numerous line figures, tables |
| Fagredaktør | Norio (Professor Emeritus Taniguchi |
| Originalsprog | United Kingdom |
| Sideantal | 422 |
| Indbinding | Hardback |
| Forlag | Oxford University Press |
| Sideoplysninger | 422 pages, halftones, numerous line figures, tables |
| Mål | 253 x 194 x 27 |
| ISBN-13 / EAN-13 | 9780198562832 |