Plasma Electronics: Applications in Microelectronic Device Fabrication
(Bog, Hardback, Engelsk)
Forlag:
Taylor & Francis Ltd
- Type: Bog
- Format: Hardback
-
Sprog:
Engelsk
- ISBN-13: 9781041192237
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Bemærk: Kan ikke garanteres før jul. Se dato på varen.
Forventes på lager: 05-05-2026
Beskrivelse
Plasma Electronics: Applications in Microelectronic Device Fabrication, Third Edition, explains the fundamental physics and numerical methods essential for advancing these technologies from laboratory research to manufacturing-scale modeling and design of plasma sources and processes.
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| Forlag | Taylor & Francis Ltd |
| Forfattere | Toshiaki (Keio University Makabe, Zoran Lj. (University of Belgrade Petrovic |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgave | 3 ed |
| Udgivelsesdato | 05-05-2026 |
| Første udgivelsesår | 2026 |
| Illustrationer | 52 Tables, black and white; 183 Line drawings, black and white; 2 Halftones, black and white; 185 Illustrations, black and white |
| Originalsprog | United Kingdom |
| Sideantal | 444 |
| Indbinding | Hardback |
| Forlag | Taylor & Francis Ltd |
| Sideoplysninger | 444 pages, 52 Tables, black and white; 183 Line drawings, black and white; 2 Halftones, black and wh |
| Mål | 234 x 156 |
| ISBN-13 / EAN-13 | 9781041192237 |