Radio-Frequency Capacitive Discharges
(Bog, Hardback, Engelsk)
Forlag:
Taylor & Francis Inc
- Type: Bog
- Format: Hardback
-
Sprog:
Engelsk
- ISBN-13: 9780849386442
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Beskrivelse
Describes radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. This work provides a treatment of the physics underlying rf discharges, techniques for generating such discharges, experimental methods and measurement techniques, and research results.
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| Forlag | Taylor & Francis Inc |
| Forfattere | Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgivelsesdato | 24-02-1995 |
| Første udgivelsesår | 1995 |
| Illustrationer | 4 Tables, black and white; 7 Halftones, black and white |
| Originalsprog | United States |
| Sideantal | 304 |
| Indbinding | Hardback |
| Forlag | Taylor & Francis Inc |
| Sideoplysninger | 304 pages, 4 Tables, black and white; 7 Halftones, black and white |
| Mål | 160 x 237 x 25 |
| ISBN-13 / EAN-13 | 9780849386442 |