Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact

(Bog, Hardback, Engelsk)
Forfattere: Cor Claeys, Eddy Simoen



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Beskrivelse

material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.

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Alle detaljer

Forlag Springer International Publishing AG
Forfattere Cor Claeys, Eddy Simoen
Type Bog
Format Hardback
Sprog Engelsk
Udgave 1st ed. 2018
Udgivelsesdato 22-08-2018
Første udgivelsesår 2018
Serie Springer Series in Materials Science
Illustrationer 207 Illustrations, color; 8 Illustrations, black and white
Originalsprog Switzerland
Sideantal 438
Indbinding Hardback
Forlag Springer International Publishing AG
Sideoplysninger 438 pages, 207 Illustrations, color; 8 Illustrations, black and white
Mål 235 x 155
ISBN-13 / EAN-13 9783319939247