Physical Design and Mask Synthesis for Directed Self-Assembly Lithography (Bog, Hardback, Engelsk) af Seongbo Shim

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

(Bog, Hardback, Engelsk)
Forfattere: Seongbo Shim, Youngsoo Shin



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Beskrivelse

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

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Alle detaljer

Forlag Springer International Publishing AG
Forfattere Seongbo Shim, Youngsoo Shin
Type Bog
Format Hardback
Sprog Engelsk
Udgave 2018 ed.
Udgivelsesdato 03-04-2018
Første udgivelsesår 2018
Serie NanoScience and Technology
Illustrationer 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p. 92 illus., 54 illus. in color.
Originalsprog Switzerland
Sideantal 138
Indbinding Hardback
Forlag Springer International Publishing AG
Sideoplysninger 138 pages, 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p. 92 illus., 54 ill
Mål 235 x 155
ISBN-13 / EAN-13 9783319762937