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Forventes på lager: 03-04-2018
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.
| Forlag | Springer International Publishing AG |
| Forfattere | Seongbo Shim, Youngsoo Shin |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgave | 2018 ed. |
| Udgivelsesdato | 03-04-2018 |
| Første udgivelsesår | 2018 |
| Serie | NanoScience and Technology |
| Illustrationer | 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p. 92 illus., 54 illus. in color. |
| Originalsprog | Switzerland |
| Sideantal | 138 |
| Indbinding | Hardback |
| Forlag | Springer International Publishing AG |
| Sideoplysninger | 138 pages, 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p. 92 illus., 54 ill |
| Mål | 235 x 155 |
| ISBN-13 / EAN-13 | 9783319762937 |