Physical Design and Mask Synthesis for Directed Self-Assembly Lithography (Bog, Paperback / softback, Engelsk) af Seongbo Shim
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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

(Bog, Paperback / softback, Engelsk)
Forfattere: Seongbo Shim, Youngsoo Shin
Forlag: Springer Nature Switzerland AG

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This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

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Forlag Springer Nature Switzerland AG
Forfattere Seongbo Shim, Youngsoo Shin
Type Bog
Format Paperback / softback
Sprog Engelsk
Udgave Softcover Reprint of the Original 1st 2018 ed.
Udgivelsesdato 08-02-2019
Første udgivelsesår 2019
Serie NanoScience and Technology
Illustrationer 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p. 92 illus., 54 illus. in color.
Originalsprog Switzerland
Sideantal 138
Indbinding Paperback / softback
Forlag Springer Nature Switzerland AG
Sideoplysninger 138 pages, 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p. 92 illus., 54 ill
Mål 235 x 155
ISBN-13 / EAN-13 9783030094553