Physics of Radiofrequency Capacitive Discharge
(Bog, Hardback, Engelsk)
Forlag:
Taylor & Francis Ltd
- Type: Bog
- Format: Hardback
-
Sprog:
Engelsk
- ISBN-13: 9781138600805
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Formater og udgaver
Beskrivelse
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.
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Alle detaljer
| Forlag | Taylor & Francis Ltd |
| Forfatter | V. P. (Lomonosov Moscow State University Savinov |
| Type | Bog |
| Format | Hardback |
| Sprog | Engelsk |
| Udgivelsesdato | 21-05-2018 |
| Første udgivelsesår | 2018 |
| Illustrationer | 7 Tables, black and white; 179 Illustrations, black and white |
| Originalsprog | United Kingdom |
| Sideantal | 342 |
| Indbinding | Hardback |
| Forlag | Taylor & Francis Ltd |
| Sideoplysninger | 342 pages, 7 Tables, black and white; 179 Illustrations, black and white |
| Mål | 165 x 241 x 26 |
| ISBN-13 / EAN-13 | 9781138600805 |