Physics of Radiofrequency Capacitive Discharge (Bog, Paperback / softback, Engelsk)

Physics of Radiofrequency Capacitive Discharge

(Bog, Paperback / softback, Engelsk)

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Beskrivelse

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.

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Alle detaljer

Forlag Taylor & Francis Ltd
Forfatter V. P. (Lomonosov Moscow State University Savinov
Type Bog
Format Paperback / softback
Sprog Engelsk
Udgivelsesdato 30-06-2020
Første udgivelsesår 2020
Originalsprog United Kingdom
Sideantal 322
Indbinding Paperback / softback
Forlag Taylor & Francis Ltd
Sideoplysninger 322 pages
Mål 234 x 156
ISBN-13 / EAN-13 9780367571627