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Forventes på lager: 08-08-2015
Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 ?m Cu-backend CMOS.
| Forlag | Springer |
| Forfattere | Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw |
| Type | Bog |
| Format | Paperback / softback |
| Sprog | Engelsk |
| Udgave | Softcover reprint of the original 1st ed. 2014 |
| Udgivelsesdato | 08-08-2015 |
| Første udgivelsesår | 2015 |
| Serie | Springer Series in Advanced Microelectronics |
| Illustrationer | 144 Illustrations, color; XVI, 199 p. 144 illus. in color. |
| Originalsprog | Netherlands |
| Sideantal | 199 |
| Indbinding | Paperback / softback |
| Forlag | Springer |
| Sideoplysninger | 199 pages, 144 Illustrations, color; XVI, 199 p. 144 illus. in color. |
| Mål | 235 x 155 |
| ISBN-13 / EAN-13 | 9789401781404 |