Stress and Strain Engineering at Nanoscale in Semiconductor Devices (Bog, Paperback / softback, Engelsk)

Stress and Strain Engineering at Nanoscale in Semiconductor Devices

(Bog, Paperback / softback, Engelsk)

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Beskrivelse

Based on 3D process and device simulations with mechanical stress simulations by finite element techniques, this book explains performance assessment of nanoscale devices with strained SiGe and other stressors. It explains the process-induced stress transfer and developments at 7nm technology and below node in the area of strain-engineered devices.

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Alle detaljer

Forlag Taylor & Francis Ltd
Forfatter Chinmay K. (SOA University Bhubaneswar Maiti
Type Bog
Format Paperback / softback
Sprog Engelsk
Udgivelsesdato 25-09-2023
Første udgivelsesår 2023
Illustrationer 23 Tables, black and white; 136 Line drawings, black and white; 3 Halftones, black and white; 139 Illustrations, black and white
Originalsprog United Kingdom
Sideantal 260
Indbinding Paperback / softback
Forlag Taylor & Francis Ltd
Sideoplysninger 260 pages, 23 Tables, black and white; 136 Line drawings, black and white; 3 Halftones, black and wh
Mål 234 x 156
ISBN-13 / EAN-13 9780367519339